8 Patents
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- US124068262025Charged Particle Beam Device and Sample Observation Method
HITACHI HIGH-TECH CORPORATION
0 cites - US121968022025Semiconductor Inspection Device and Method for Inspecting Semiconductor Sample
HITACHI HIGH-TECH CORPORATION
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- US116315682023Device Defect Detection Method Using a Charged Particle Beam
HITACHI HIGH-TECH CORPORATION
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