Patents/Inventors

Yasuhiro Morikawa

KanagawaJP4 patents

5 Patents

US126146982026
Plasma Processing Apparatus and Plasma Processing Method
ULVAC, Inc.
0 cites
US124697112025
Etching Method
ULVAC, Inc.
0 cites
US122179692025
Silicon Dry Etching Method
ULVAC, Inc
0 cites
US122057952025
Plasma Processing Device
ULVAC, Inc.
0 cites
US120209422024
Etching Method
ULVAC, Inc.
0 cites