13 Patents
- US125371792026Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites - US124379792025Capacitive Sensors and Capacitive Sensing Locations for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
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- US121230902024Differential Capacitive Sensor for In-situ Film Thickness and Dielectric Constant Measurement
APPLIED MATERIALS, Inc.
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- US117812142023Differential Capacitive Sensors for In-situ Film Thickness and Dielectric Constant Measurement
APPLIED MATERIALS, Inc.
0 cites - 0 cites
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- US115453462023Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites