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Inventors
Yao-syuan Cheng
Hsinchu County
TW
1 patent
2 Patents
US12224159
2025
Gas Mixing Method to Enhance Plasma
SKY TECH Inc.
0 cites
US11597999
2023
Method and Device for Decreasing Generation of Surface Oxide of Aluminum Nitride
SKY TECH Inc.
0 cites