Patents/Inventors

Yamato Tonegawa

YamanashiJP8 patents

8 Patents

US125884402026
Substrate Processing Method and Substrate Processing Apparatus for Etching Using Oxidization
Tokyo Electron Limited
0 cites
US124889912025
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US124696942025
Film Forming Method
Tokyo Electron Limited
0 cites
US122371672025
Deposition Method
Tokyo Electron Limited
0 cites
US120606402024
Film Forming Method and System
TOKYO ELECTRON LIMITED
0 cites
US119231772024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117812192023
Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116948902023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites