Ya-ming Chen

6 Patents

• US126032492026

  Selective Deposition Using Differential Surface Charging

  Tokyo Electron Limited

  0 cites
• US123410092025

  Variable Hardness Amorphous Carbon Mask

  TOKYO ELECTRON LIMITED

  0 cites
• US123004682025

  Method of Uniformity Control

  Tokyo Electron Limited

  0 cites
• US122179352025

  Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses

  Tokyo Electron Limited

  0 cites
• US120401762024

  Technologies for High Aspect Ratio Carbon Etching with Inserted Charge Dissipation Layer

  Tokyo Electron Limited

  0 cites
• US120092112024

  Method for Highly Anisotropic Etching of Titanium Oxide Spacer Using Selective Top-deposition

  Tokyo Electron Limited

  0 cites