Ya-lun Chen

2 Patents

• US120875922024

  Ambient Controlled Two-step Thermal Treatment for Spin-on Coating Layer Planarization

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US119011892024

  Ambient Controlled Two-step Thermal Treatment for Spin-on Coating Layer Planarization

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites