Patents/Inventors

Ya-hui Chang

HsinchuTW5 patents

7 Patents

US124826542025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124761452025
Self-aligned Cut-metal Layer Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124761502025
Critical Dimension Uniformity (CDU) Control Method and Semiconductor Substrate Processing System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123548732025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120946912024
Etch Apparatus for Compensating Shifted Overlayers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120273682024
Method for Fabricating Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117306672023
Wearable Stimulation Device for Stimulating Deep Muscles of Abdomen and Waist of Human Body
Tzu Chi University
0 cites