28 Patents
- US124696682025Systems and Methods for Compensating Dispersion of a Beam Separator in a Single-beam or Multi-beam Apparatus
ASML Netherlands B.V.
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- US123476432025Multiple Charged-particle Beam Apparatus and Methods of Operating the Same Using Movable Lenses
ASML Netherlands B.V.
0 cites - US122780812025System and Method for Alignment of Secondary Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
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- US121911092025Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands B.V.
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- US117215212023Multi-beam Inspection Apparatus with Improved Detection Performance of Signal Electrons
ASML Netherlands B.V.
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- US116767922023Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands, B.V
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- US116144162023System and Method for Aligning Electron Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
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