Patents/Inventors

Xuefeng Hua

Foster City, CAUS4 patents

3 Patents

US125506872026
Wafer Edge Deposition for Wafer Level Packaging
Lam Research Corporation
0 cites
US125422592026
Plasma-exclusion-zone Rings for Processing Notched Wafers
Lam Research Corporation
0 cites
US123320422025
In-situ Wafer Thickness and Gap Monitoring Using Through Beam Laser Sensor
Lam Research Corporation
0 cites