Patents/Inventors

Xue Chang

San Jose, CAUS4 patents

4 Patents

US125623532026
Replaceable Electrostatic Chuck Outer Ring for Edge Arcing Mitigation
Applied Materials, Inc.
0 cites
US121836052024
In-situ Semiconductor Processing Chamber Temperature Apparatus
Applied Materials, Inc.
0 cites
US118351462023
Symmetric Flow Valve for Flow Conductance Control
APPLIED MATERIALS, Inc.
0 cites
US115519652023
Apparatus to Reduce Polymers Deposition
Applied Materials, Inc.
0 cites