7 Patents
- US126032632026Apparatuses and Techniques for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites - US125001142025Wafer Lift Pin Mechanism for Preventing Local Backside Deposition
LAM RESEARCH CORPORATION
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- US119182532024Active Variable Stiffness Clamping Device for Pelvic Fracture Reduction Robot
Shanghai University
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