Patents/Inventors

Xinning Luan

Tempe, AZUS10 patents

7 Patents

US125842402026
Low Mass Substrate Support
Applied Materials, Inc.
0 cites
US125347982026
Method of Coating a Chamber Component
Applied Materials, Inc.
0 cites
US125123622025
Susceptor Improvement
Applied Materials, Inc.
0 cites
US124976972025
Layer with Discrete Islands Formed on a Substrate Support
Applied Materials, Inc.
0 cites
US122437612025
Detection and Analysis of Substrate Support and Pre-heat Ring in a Process Chamber via Imaging
Applied Materials, Inc.
0 cites
US121806112024
Methods of Forming Silicon Carbide Coated Base Substrates at Multiple Temperatures
APPLIED MATERIALS, Inc.
0 cites
US118279992023
Methods of Forming Silicon Carbide Coated Base Substrates at Multiple Temperatures
Applied Materials, Inc.
0 cites