Patents/Inventors

Xinliang Lu

Fremont, CAUS2 patents

3 Patents

US123946702025
Nucleation-free Gap Fill ALD Process
Applied Materials, Inc.
0 cites
US117911812023
Methods for the Treatment of Workpieces
MATTSON TECHNOLOGY, Inc.
0 cites
US116262692023
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
MATTSON TECHNOLOGY, Inc.
0 cites