Xinkang Tian

7 Patents

• US126222102026

  Metrology Integrated with Vacuum Processing

  Tokyo Electron Limited

  0 cites
• US125884672026

  Optical Sensors for Measuring Properties of Consumable Parts in a Semiconductor Plasma Processing Chamber

  Tokyo Electron Limited

  0 cites
• US122610302025

  Normal-incidence In-situ Process Monitor Sensor

  Tokyo Electron Limited

  0 cites
• US121659372024

  Optical Diagnostics of Semiconductor Process Using Hyperspectral Imaging

  Tokyo Electron Limited

  0 cites
• US119617212024

  Normal-incidence In-situ Process Monitor Sensor

  Tokyo Electron Limited

  0 cites
• US117631612023

  Enhanced Resolution in Semiconductor Fabrication Data Acquisition Instruments Using Machine Learning

  Tokyo Electron Limited

  0 cites
• US116928742023

  Peak Alignment for the Wavelength Calibration of a Spectrometer

  Tokyo Electron Limited

  0 cites