Patents/Inventors

Xingfei Mao

BeijingCN2 patents

3 Patents

US121911142025
Semiconductor Reaction Chamber and Atomic Layer Plasma Etching Apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd.
0 cites
US120805242024
Semiconductor Processing Chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd.
0 cites
US116948802023
Lift Thimble System, Reaction Chamber, and Semiconductor Processing Equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., Ltd
0 cites