Patents/Inventors

Xinan Luo

San Jose, CAUS2 patents

3 Patents

US124696682025
Systems and Methods for Compensating Dispersion of a Beam Separator in a Single-beam or Multi-beam Apparatus
ASML Netherlands B.V.
0 cites
US119616982024
Replaceable Module for a Charged Particle Apparatus
ASML Netherlands B.V.
0 cites
US116144162023
System and Method for Aligning Electron Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
0 cites