Patents/Inventors

Xiaopu Li

San Jose, CAUS9 patents

9 Patents

US125818802026
Faraday Faceplate
Applied Materials, Inc.
0 cites
US123385302025
Shaped Showerhead for Edge Plasma Modulation
Applied Materials, Inc.
0 cites
US122285342025
Capacitive Sensor for Monitoring Gas Concentration
Applied Materials, Inc.
0 cites
US122241562025
Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites
US120612152024
RF Measurement from a Transmission Line Sensor
Applied Materials, Inc.
0 cites
US119598682024
Capacitive Sensor for Monitoring Gas Concentration
Applied Materials, Inc.
0 cites
US119086622024
Device and Method for Tuning Plasma Distribution Using Phase Control
Applied Materials, Inc.
0 cites
US118238712023
Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites
US115812062023
Capacitive Sensor for Chamber Condition Monitoring
Applied Materials, Inc.
0 cites