Xiaolin C. Chen

6 Patents

• US126046902026

  Systems and Methods for Selective Metal-containing Hardmask Removal

  Applied Materials, Inc.

  0 cites
• US122725632025

  Metal Oxide Directional Removal

  Applied Materials, Inc.

  0 cites
• US120875952024

  Metal Deposition and Etch in High Aspect-ratio Features

  Applied Materials, Inc.

  0 cites
• US119843252024

  Selective Removal of Transition Metal Nitride Materials

  Applied Materials, Inc.

  0 cites
• US117988132023

  Selective Removal of Ruthenium-containing Materials

  Applied Materials, Inc.

  0 cites
• US116315892023

  Metal Etch in High Aspect-ratio Features

  Applied Materials, Inc.

  0 cites