Patents/Inventors

Xiaolan Zhong

ShanghaiCN2 patents

2 Patents

US120027082024
Method for Forming Intermetallic Air Gap
SHANGHAI INTEGRATED CIRCUIT EQUIPMENT & MATERIALS INDUSTRY INNOVATION CENTER CO., Ltd
0 cites
US117696792023
Apparatus and Method for Improving Film Thickness Uniformity
SHANGHAI IC R&D CENTER CO., Ltd
0 cites