Patents/Inventors

Xiaolan Ba

Fremont, CAUS4 patents

5 Patents

US122372212025
Nucleation-free Tungsten Deposition
Lam Research Corporation
0 cites
US120778582024
Tungsten Deposition
Lam Research Corporation
0 cites
US120606392024
Rapid Flush Purging During Atomic Layer Deposition
Lam Research Corporation
0 cites
US120149282024
Multi-layer Feature Fill
Lam Research Corporation
0 cites
US119729522024
Atomic Layer Deposition on 3D NAND Structures
Lam Research Corporation
0 cites