Woo Hyung Choi

3 Patents

• US125704852026

  Substrate Transfer Apparatus Using Upper and Lower Magnetic Levitation Rails

  VM Inc.

  0 cites
• US122939332025

  Electrostatic Chuck with Multiple Heater Zones

  VM Inc.

  0 cites
• US118412842023

  Particle Trapping Apparatus for Preventing an Error of a Pressure Measurement

  ADAPTIVE PLASMA TECHNOLOGY Corp.

  0 cites