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Inventors
Wonwoong Chung
Incheon
KR
1 patent
2 Patents
US12287064
2025
Gas Container and Deposition System Including the Same
SK Specialty Co., Ltd.
0 cites
US12183591
2024
Etching Gas Compositions, Methods of Forming Micropatterns, and Methods of Manufacturing Semiconductor Device
WONIK MATERIALS
0 cites