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Inventors
Wolfgang Scherm
Nattheim
DE
1 patent
2 Patents
US12393119
2025
Optical System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US12058831
2024
Combined Power Electronics for an Electric Drive and a Transmission Control of the Electric Drive, Inverter with Such Combined Power Electronics, Electric Drive with Such an Inverter
ZF Friedrichshafen AG
0 cites