Patents/Inventors

Wolfgang R. Aderhold

Cupertino, CAUS11 patents

10 Patents

US125884552026
Dopant Diffusion with Short High Temperature Anneal Pulses
Applied Materials, Inc.
0 cites
US125337172026
Process Chamber Clean
Applied Materials, Inc.
0 cites
US123664812025
Reflector Plate for Substrate Processing
Applied Materials, Inc.
0 cites
US121762422024
Rotatable Thermal Processing Chamber
Applied Materials, Inc.
0 cites
US120859652024
Systems, Methods, and Apparatus for Correcting Thermal Processing of Substrates
Applied Materials, Inc.
0 cites
US120805732024
Temperature Offset and Zone Control Tuning
Applied Materials, Inc.
0 cites
US119423812024
System for Non Radial Temperature Control for Rotating Substrates
Applied Materials, Inc.
0 cites
US119159532024
Apparatus, Systems, and Methods of Measuring Edge Ring Distance for Thermal Processing Chambers
Applied Materials, Inc.
0 cites
US118286562023
Reflector Plate for Substrate Processing
APPLIED MATERIALS, Inc.
0 cites
US116642502023
Methods and Apparatus for Measuring Edge Ring Temperature
APPLIED MATERIALS, Inc.
0 cites