Patents/Inventors

Wolf Naetar

ViennaAT1 patent

2 Patents

US124812142025
Correction of Blur Variation in a Multi-beam Writer
IMS Nanofabrication GmbH
0 cites
US115690642023
Method for Irradiating a Target Using Restricted Placement Grids
IMS Nanofabrication GmbH
0 cites