Patents/Inventors

Willi Anderl

HuettlingenDE3 patents

3 Patents

US125470802026
Field Facet System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US123531372025
Field Facet System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US117893672023
Facet Mirror for an Illumination Optical Unit of a Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites