Patents/Inventors

Willem Henk Urbanus

DelftNL2 patents

3 Patents

US123879032025
Aberration Correction in Charged Particle System
ASML Netherlands B.V.
0 cites
US119616272024
Vacuum Chamber Arrangement for Charged Particle Beam Generator
ASML Netherlands B.V.
0 cites
US117052522023
Vacuum Chamber Arrangement for Charged Particle Beam Generator
ASML Netherlands B.V.
0 cites