Patents/Inventors

Wilhelm Platow

Newburyport, MAUS5 patents

5 Patents

US124313322025
High Energy Implanter with Small Footprint
Axcelis Technologies, Inc.
0 cites
US121129182024
Dual Source Injector with Switchable Analyzing Magnet
Axcelis Technologies, Inc.
0 cites
US118238582023
Dual Source Injector with Switchable Analyzing Magnet
Axcelis Technologies, Inc.
0 cites
US117987752023
Extended Lifetime Dual Indirectly-heated Cathode Ion Source
Axcelis Technologies, Inc.
0 cites
US115453302023
Ion Source with Multiple Bias Electrodes
Axcelis Technologies, Inc.
0 cites