15 Patents
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- US124105222025Substrate Processing Apparatus and Method for Processing Substrates
ASM IP Holding B.V.
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- US120000422024Sequential Infiltration Synthesis Apparatus and a Method of Forming a Patterned Structure
ASM IP Holding B.V.
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- US118517552023Sequential Infiltration Synthesis Apparatus and a Method of Forming a Patterned Structure
ASM IP Holding B.V.
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- US116294072023Substrate Processing Apparatus and Method for Processing Substrates
ASM IP Holding B.V.
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