9 Patents
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- US118549112023Methods, Systems, and Apparatus for Conducting Chucking Operations Using an Adjusted Chucking Voltage If a Process Shift Occurs
Applied Materials, Inc.
0 cites - US117696832023Chamber Component with Protective Ceramic Coating Containing Yttrium, Aluminum and Oxygen
Applied Materials, Inc.
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- US116486392023Polishing Jig Assembly for a New or Refurbished Electrostatic Chuck
Applied Materials, Inc.
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