Patents/Inventors

Wenbing Yang

Campbell, CAUS9 patents

9 Patents

US125108252025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US125108262025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US124179022025
Method for Cleaning a Chamber
Lam Research Corporation
0 cites
US124008422025
Method of Cleaning Chamber Components with Metal Etch Residues
Lam Research Corporation
0 cites
US122665422025
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corpporation
0 cites
US122566452025
Chemical Etch Nonvolatile Materials for MRAM Patterning
Lam Research Corporation
0 cites
US121054222024
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US120805622024
Atomic Layer Etch and Ion Beam Etch Patterning
Lam Research Corporation
0 cites
US119357582024
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corporation
0 cites