Patents/Inventors

Wen-yao Wei

HsinchuTW1 patent

2 Patents

US124932372025
EUV Pellicle and Mounting Method Thereof on Photo Mask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118222302023
EUV Pellicle and Mounting Method Thereof on Photo Mask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites