12 Patents
- 0 cites
- US124416042025Micro-electromechanical Systems (MEMS) Device with Outgas Layer
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US123927742025Biosensor System with Integrated Microneedle
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US123622402025Method and System for Detecting Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites - US122697352025Dielectric Protection Layer Configured to Increase Performance of Mems Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US122150162025Piezoelectric Anti-stiction Structure for Microelectromechanical Systems
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US121238462024Wafer-level Packaging of Solid-state Biosensor, Microfluidics, and Through-silicon Via
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121238712024Biosensor System with Integrated Microneedle
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- US118343252023Piezoelectric Anti-stiction Structure for Microelectromechanical Systems
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US117472982023Wafer-level Packaging of Solid-state Biosensor, Microfluidics, and Through-silicon Via
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US116675222023MEMS Package Comprising Multi-depth Trenches
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites