Weitian Kou

4 Patents

• US121241792024

  Method of Wafer Alignment Using at Resolution Metrology on Product Features

  ASML NETHERLANDS B.V.

  0 cites
• US120449812024

  Method and Apparatus for Optimization of Lithographic Process

  ASML NETHERLANDS B.V.

  0 cites
• US117823492023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US115927532023

  Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites