3 Patents
- US125470812026Illumination Compensation Method
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120858462024Method for Inverse Optical Proximity Correction of Super-resolution Lithography Based on Level Set Algorithm
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US116933202023Secondary Imaging Optical Lithography Method and Apparatus
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites