5 Patents
- US124930042025Method for Determining Parameters of Three Dimensional Nanostructure and Apparatus Applying the Same
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
0 cites - US122596602025Inspection Method and Inspection Platform for Lithography
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
0 cites - US121888832025X-ray Reflectometry Apparatus and Method Thereof for Measuring Three Dimensional Nanostructures on Flat Substrate
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
0 cites - US118675952024X-ray Reflectometry Apparatus and Method Thereof for Measuring Three Dimensional Nanostructures on Flat Substrate
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
0 cites - US115790992023X-ray Reflectometry Apparatus and Method Thereof for Measuring Three Dimensional Nanostructures on Flat Substrate
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
0 cites