Patents/Inventors

Wei-chun Yen

TainanTW5 patents

4 Patents

US125108272025
EUV Radiation Source Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124497342025
Lithography Apparatus and Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120667612024
Inspection Tool for an Extreme Ultraviolet Radiation Source to Observe Tin Residual
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120076942024
Lithography Apparatus and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites