Wataru Sugimura

3 Patents

• US125955852026

  Heating Part of Silicon Single Crystal Manufacturing Device, Convection Pattern Control Method for Silicon Melt, Silicon Single Crystal Manufacturing Method, Silicon Wafer Manufacturing Method, Silicon Single Crystal Manufacturing Device, and Convection Pattern Control System for Silicon Melt

  SUMCO CORPORATION

  0 cites
• US118850382024

  Method of Estimating Convection Pattern of Silicon Melt, Method of Estimating Oxygen Concentration of Silicon Single Crystal, Method of Manufacturing Silicon Single Crystal, and Raising Device of Silicon Single Crystal

  SUMCO CORPORATION

  0 cites
• US117812422023

  Method for Controlling Convection Pattern of Silicon Melt, Method for Producing Silicon Single Crystals, and Device for Pulling Silicon Single Crystals

  SUMCO CORPORATION

  0 cites