Patents/Inventors

Wataru Sakai

KyotoJP2 patents

3 Patents

US122939352025
Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US120428132024
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US118398932023
Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites