Patents/Inventors

Wataru Omuro

HiratsukaJP1 patent

3 Patents

US124446262025
Temperature Control Device for Semiconductor Wafer and Temperature Control Method for Semiconductor Wafer
TOKYO SEIMITSU CO., Ltd.
0 cites
US124446312025
Substrate Support Device
KELK Ltd.
0 cites
US121835522024
Substrate Processing Apparatus
KELK Ltd.
0 cites