Patents/Inventors

Wataru Matsumoto

YamanashiJP12 patents

9 Patents

US125989572026
Substrate Transfer Apparatus and Substrate Transfer Method
Tokyo Electron Limited
0 cites
US125123442025
Apparatus for Transferring Member to Be Disposed in Substrate Processing Chamber, Substrate Processing System, and Method for Transferring Member
Tokyo Electron Limited
0 cites
US124225302025
Ranging Device and Ranging Method
MIRAXIA EDGE TECHNOLOGY CORPORATION
0 cites
US123622152025
Apparatus for Transferring Substrate and Method for Transferring Substrate
Tokyo Electron Limited
0 cites
US123308882025
Substrate Transfer Device and Method of Cooling Arm
TOKYO ELECTRON LIMITED
0 cites
US122117192025
Method of Controlling Substrate Transfer System and the Substrate Transfer System
TOKYO ELECTRON LIMITED
0 cites
US121989552025
Substrate Transfer Method and Substrate Transfer System
Tokyo Electron Limited
0 cites
US117256552023
Oil Pump
TOYODA GOSEI CO., Ltd.
0 cites
US115804072023
Learning Device, Signal Processing Device, and Learning Method
Mitsubishi Electric Corporation
0 cites