Walter Pauls

3 Patents

• US124943432025

  Multiple Particle Beam Microscope and Associated Method with Fast Autofocus Around an Adjustable Working Distance

  Carl Zeiss Multisem GmbH

  0 cites
• US124227432025

  Method for Measuring a Reflectivity of an Object for Measurement Light and Metrology System for Carrying Out the Method

  Carl Zeiss SMT GmbH

  0 cites
• US121745462024

  Method for Measuring an Effect of a Wavelength-dependent Measuring Light Reflectivity and an Effect of a Polarization of Measuring Light on a Measuring Light Impingement on a Lithography Mask

  Carl Zeiss SMT GmbH

  0 cites