Patents/Inventors

Walter Dale Gillespie

Poway, CAUS8 patents

7 Patents

US125977532026
Packed-bed Filter for Metal Fluoride Dust Trapping in Laser Discharge Chambers
Cymer, LLC
0 cites
US125869782026
Apparatus for and Method of Generating Multiple Laser Beams
Cymer, LLC
0 cites
US123748532025
Control System for a Plurality of Deep Ultraviolet Optical Oscillators
Cymer, LLC
0 cites
US119492022024
Gas Management System
Cymer, LLC
0 cites
US119492032024
Gas Management System
Cymer, LLC
0 cites
US117772712023
Method of and Apparatus for Extending Electrode Life in a Laser Chamber
Cymer, LLC
0 cites
US116140122023
Nonwoven Screens for Dust Trapping in Laser Discharge Chambers
Cymer, LLC
0 cites