4 Patents
- US125842132026Heat-resistant Coat Member Packaged Body, and Method for Packaging Heat-resistant Coat Member
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - 0 cites
- US118850222024Method of Forming a Film on a Substrate by Chemical Vapor Deposition
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites - US115552552023Tantalum Carbide Coated Carbon Material, Manufacturing Method Thereof, and Member for Apparatus for Manufacturing Semiconductor Single Crystal
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites