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Inventors
Volkmar Senz
Metzingen
DE
6 patents
6 Patents
US12460981
2025
Micromechanical Component for a Capacitive Pressure Sensor Device, Capacitive Pressure Sensor Device, and a Manufacturing Method for a Capacitive Pressure Sensor Device
ROBERT BOSCH GmbH
0 cites
US12448280
2025
Bond Structures on MEMS Element and ASIC Element
ROBERT BOSCH GmbH
0 cites
US12030773
2024
Method for Producing a Wafer Connection
ROBERT BOSCH GmbH
0 cites
US11976996
2024
Micromechanical Component for a Capacitive Pressure Sensor Device
ROBERT BOSCH GmbH
0 cites
US11940345
2024
Micromechanical Component for a Capacitive Pressure Sensor Device
ROBERT BOSCH GmbH
0 cites
US11933689
2024
MEMS Capacitive Sensor Including Improved Contact Separation
ROBERT BOSCH GmbH
0 cites