28 Patents
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- US124871902025System and Method for Isolation of Specific Fourier Pupil Frequency in Overlay Metrology
KLA Corporation
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- US122538052025Scatterometry Overlay Metrology with Orthogonal Fine-pitch Segmentation
KLA Corporation
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- US122221992025Systems and Methods for Measurement of Misregistration and Amelioration Thereof
KLA Corporation
0 cites - US121702152024Systems and Methods for Correction of Impact of Wafer Tilt on Misregistration Measurements
KLA Corporation
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- US121054332024Imaging Overlay Targets Using Moiré Elements and Rotational Symmetry Arrangements
KLA Corporation
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- US120677452024Image Pre-processing for Overlay Metrology Using Decomposition Techniques
KLA Corporation
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- US120136342024Reduction or Elimination of Pattern Placement Error in Metrology Measurements
KLA-TENCOR CORPORATION
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- US118525902023Systems and Methods for Metrology with Layer-specific Illumination Spectra
KLA Corporation
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