Patents/Inventors

Vladimir Galburt

Santa Clara, CAUS2 patents

3 Patents

US122517882025
Polishing Head with Local Wafer Pressure
APPLIED MATERIALS, Inc.
0 cites
US119869232024
Polishing Head with Local Wafer Pressure
APPLIED MATERIALS, Inc.
0 cites
US117800492023
Polishing Carrier Head with Multiple Angular Pressurizable Zones
Applied Materials, Inc.
0 cites