Patents/Inventors

Vivek Bharat Shah

Santa Clara, CAUS5 patents

5 Patents

US125852322026
Substrate Support Characterization to Build a Digital Twin
Applied Materials, Inc.
0 cites
US123277142025
Plasma Generation Quality Monitoring Using Multi-channel Sensor Data
Applied Materials, Inc.
0 cites
US120209112024
Chucking Process and System for Substrate Processing Chambers
Applied Materials, Inc.
0 cites
US118592752024
Techniques to Improve Adhesion and Defects for Tungsten Carbide Film
Applied Materials, Inc.
0 cites
US115453762023
Plasma Parameters and Skew Characterization by High Speed Imaging
Applied Materials, Inc.
0 cites