Patents/Inventors

Vivek B. Shah

Santa Clara, CAUS2 patents

3 Patents

US125060242025
Method and Mechanism for Contact-free Process Chamber Characterization
Applied Materials, Inc.
0 cites
US120573332024
Metrology Slot Plates
Applied Materials, Inc.
0 cites
US118087462023
Concentration Sensor for Precursor Delivery System
Applied Materials, Inc.
0 cites